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Summary of ISO/TC 201 Standard: ISO 18115‐1:2010 – surface chemical analysis – vocabulary – general terms and terms used in spectroscopy
Authors:M P Seah
Affiliation:1. 020 9843 6634020 8943 6453;2. National Physical Laboratory, , Teddington, Middlesex, TW11 0LW UK
Abstract:This International Standard revises ISO 18115:2001 and the two subsequent amendments by bringing the material up to date and separating out the general terms and terms used in spectroscopy into Part 1, and terms relating to scanning probe microscopy into Part 2. This part, Part 1, covers 548 terms used in Auger electron spectroscopy, elastic peak electron spectroscopy, reflected electron energy loss spectroscopy, secondary ion mass spectrometry, ultra‐violet photoelectron spectroscopy, X‐ray photoelectron spectroscopy, and so on, as well as 52 acronyms. The terms cover words or phrases used in describing the samples, instruments, and theoretical concepts involved in surface chemical analysis. Copyright © 2012 Crown copyright.
Keywords:AES  instrumentation  samples  SIMS  surface analysis  terminology  vocabulary  XPS
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