微波ECR全方位离子注入制备类金刚石碳膜的结构及摩擦学性能研究

利用微波ECR全方位离子注入技术，在单晶硅（100）衬底上制备类金刚石薄膜.分析结果表明，所制备的类金刚石碳膜具有典型的类金刚石结构特征，薄膜均匀、致密，表面粗糙度小，摩擦系数小.其中，薄膜的结构和性能与氢流量比关系密切，随氢流量比的增加，薄膜的沉积速率减小，表面粗糙度降低，且生成sp³键更加趋向于金刚石结构，表面能 更低，从而使摩擦系数大幅降低. 关键词： 全方位离子注入 类金刚石碳膜 拉曼光谱 摩擦磨损

Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation

Diamond like carbon(DLC) films were prepared on silicon (100) wafer by microwave electron cyclotron resonance(MW ECR) plasma source ion implantation(PSII). The results showed that the films had typical properties of DLC. The films was dense and homogeneous, and the roughness and friction coefficient was low. The connection between the properties of the films and the flow ratio of hydrogen was closely. With the increase of the flow ratio of hydrogen to methane, the deposition rate and the roughness of the films decreased. The sp 3 bond obtained was more likely diamond like, which had low surface energy, consequently making the friction coefficient of the films decrease rapidly.