A modified moire interferometer for three-dimensional displacement measurement |
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作者姓名: | 王卫宁 孙建海 |
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作者单位: | Department of Physics,Capital Normal University,Beijing 100037,Institute of Electronics,Chinese Academy of Sciences,Beijing 100080 |
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基金项目: | The authors are grateful to the financial support by the Science and Technology Development Foundation, Education Commission of Beijing, P. R. China (No. 00KJ-094). |
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摘 要: | This paper presents a new optical interferometric system, MMI-T/G, composed of a modified four-beam moire interferometer and a Twyman/Green interferometer. The MMI-T/G system can measure three-dimensional displacement fringe patterns with a single loading on the specimen, and the in-plane and out-of-plane displacement fields can be measured independently and defined clearly. The optical setup has the advantages of structural novelty, flexibility, and high fringe contrast. Moreover, the in-plane displacement sensitivity is twice of that of the normal moire interferometer. The measuring techniques to obtain the fringe patterns and displacement fields using the MMI-T/G system are described. The experimental results of thermal displacement of an electronic device are shown.
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