| 热电式微波功率传感器的优化设计 |
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| 引用本文： | 韩磊,黄庆安,廖小平.热电式微波功率传感器的优化设计[J].半导体学报,2008,29(4):789-793. |
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| 作者姓名： | 韩磊 黄庆安 廖小平 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,南京210096 |
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| 基金项目： | 国家自然科学基金
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装备预先研究资助项目 |
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| 摘 要： | 提出了一种热电式微波功率传感器的二维热分布解析模型,通过分析传感器的各种结构参数对热分布的影响,给出了热电式微波功率传感器的优化设计.为了获得高灵敏度,给出了设计膜的厚度、匹配电阻与热电堆热端的距离、热电堆悬浮部分的长度等结构参数的原则,并利用Ansys模拟结果和解析结果进行对比验证,结果显示两者吻合较好,说明了解析模型的适用性,可在设计该类传感器时参考.
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| 关 键 词： | 热电式 微波功率 解析模型 二维热分布 |
| 文章编号： | 0253-4177(2008)04-0789-05 |
| 修稿时间： | 2007年9月17日 |
Optimization of a Thermoelectric Microwave Power Sensor |
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| Han Lei,Huang Qing\'an , Liao Xiaoping.Optimization of a Thermoelectric Microwave Power Sensor[J].Chinese Journal of Semiconductors,2008,29(4):789-793. |
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| Authors: | Han Lei Huang Qing\'an Liao Xiaoping |
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| Institution: | Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China;Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China;Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China |
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| Abstract: | A 2D analytical model of the thermal distribution of a thermoelectric microwave power sensor is presented.In order to optimize the size of the sensor,the influences of various structure parameters on the thermal distribution are analyzed.The paper presents the design principle of the parameters,including the membrane thickness,the distance between the matched resistor and the hot junctions of the thermopile,and the suspended length of the thermopile,to achieve high sensitivity.The analytical results agree well with the Ansys simulative results. |
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| Keywords: | thermoelectric microwave power analytical model 2D thermal distribution |
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