Abstract: | Thermodynamics of the System Si? Cl? H By static and dynamic methods the equilibria 4SiHCl3,g = 3SiHCl4,g + Si,s + 2H2,g (1) between 800 and 1140 K and SiCl4,g + H2,g = SiHCl3,g + HCl,g (2) between 1170 and 1450 K were investigated. The expression for the temperature dependence of the equilibria were found to be lg Kp [Torr] = (5.688–1520/T) ± 0.32 (1) and lg Kp = (1.38/3250/T) ± 0.16 (2). The values measured for reaction pressures and equilibrium constants lead to the conclusion, that the difference of enthalpies of formation of SiCl4 and SiHCl3 found in literature is nessecarily to be corrected by 5–6 kcal/mole. With ΔH(SiCl4,g) = ?157.1 kcal/mole the equilibrium measurements lead to the enthalpy of formation for SiHCl3,g of ΔH(SiHCl3,g) = ?118.2 kcal/mole. |