首页 | 本学科首页   官方微博 | 高级检索  
     检索      

一种聚合物实心微针的制作方法
引用本文:肖丽君,陈翔,汪鹏,李以贵,陈迪.一种聚合物实心微针的制作方法[J].微纳电子技术,2009,46(12).
作者姓名:肖丽君  陈翔  汪鹏  李以贵  陈迪
作者单位:上海交通大学微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200240
基金项目:国家863高技术研究发展计划资助项目 
摘    要:为实现制作微针加工工艺简单、加工周期短及成本低的目的,提出了一种制作聚合物微针的新方法,这种聚合物微针的制作过程主要包括三个部分:微针原始模具的制作、聚合物微针模具的制作和浇铸工艺复制微针。通过KOH腐蚀液刻蚀晶面为{100}的Si片和紫外线对准光刻SU8胶得到由Si-SU8胶构成的原始模具,再在该模具上注入聚二甲基硅氧烷(PDMS)进行转模,固化脱模后在PDMS微针二级模具表面溅射一层Cu/Cr金属薄膜,然后再注入PDMS,得到最终的聚合物微针模具,对该模具进行浇铸工艺,便可批量制作微针。通过浇注PDMS获得微针初始结构,使针尖和针体合为一体,提高了脱模的可靠性;通过改变设计,能得到不同截面尺寸和长度的微针,因此这种方法具有很高的灵活性。

关 键 词:微针  原始模具  最终聚合物模具  针尖  针体  聚二甲基硅氧烷

A Method of Fabricating Polymer Solid Microneedles
Abstract:A new method of fabricating polymer microneedles was proposed to achieve the simple process,short processing cycle and low cost for microneedles fabrication.The entire fabricating process of polymer microneedles includes the fabrication of original mold,the fabrication of polymer mold and the casting replication of polymer microneedles.An original mold constituted with silicon and SU8 epoxy was gotten through selectively etching the {100} planes of silicon by potassium hydroxide(KOH)and exposing SU8 epoxy with ultraviolet lithography alignment technology.Through polydimethylsiloxane(PDMS)casted into the mold,a PDMS mold was made after cured and demoulded from the original mold.A layer of Cu/Cr film was sputtered on the surface of the PDMS mold for easy knockout,and then PDMS was casted into the PDMS mold again and cured at a suitable temperature before knockout.Hereto,a polymer microneedle mold was made.Polymer microneedles were produced in batch by casting process by using the mold.The results show that using the PDMS mold to replicate the polymer microneedle mold can improve the reliability of demoulding,and the section size and length of microneedles can be changed by changing designs.So this method is also very flexible.
Keywords:microneedle  original mold  final polymer mold  microneedle tip  microneedle body  PDMS
本文献已被 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号