Size Reduction of Tunable Micromachined Filters for High Speed Operations |
| |
| Authors: | Tomoyuki Hino Takeru Amano Wiganes Janto Fumio Koyama |
| |
| Affiliation: | Microsystem Reserch Center, P&I Lab., Tokyo Institute of Technology 4259 Nagatsuta, Midori-ku Yokohama, 226-8503 JAPAN |
| |
| Abstract: | The size reduction of tunable micromachined filters is carried out for high-speed wavelength tuning. We fabricated micromachined filters having a miniature structure with an air gap of 300 nm and a short cantilever of 45 μm, exhibiting fast response of below 3 μs. |
| |
| Keywords: | |
| 本文献已被 万方数据 等数据库收录！ |
|
