基于MEMS微镜的傅里叶变换光谱仪原理与分析

提出了一种新型的基于可编程MEMS(micro-electro-mechanical systems)微镜的微型傅里叶变换红外光谱仪。该光谱仪采用可编程MEMS微镜和倾斜反射镜替代了传统傅里叶变换光谱仪的动镜系统。理论分析了该光谱仪的工作原理，并进行了计算机仿真，验证了该方法的可行性。结果表明，该光谱系统能够准确地还原光谱信息，其光谱分辨率在近红外区域小于5 nm，波长准确性约1 nm，系统理论上的信号采集周期约50 ms。适合于利用阿达玛变换提高信噪比，可应用于微量物质检测。

The Principle and Analysis of Micro-Fourier Transform Spectrometer Based on MEMS Micro-Mirror

The present paper puts forward a novel micro-Fourier transform infrared spectrometer based on programmable MEMS micro-mirror. This design uses a MEMS micro-mirror and a slantwise reflector to replace the moving mirror system on traditional spectrometer. This paper analyzes the operating principle of this spectrometer and gives the simulation result to prove the feasibility of this method. The results show that the spectral resolution is less than 5 nm in near-infrared wave band, the wavelength accuracy is approximately 1 nm and the sampling period of this spectrometer is approximately 50 ms. This method can use Hadamard transform to improve the SNR.