Deposition of nanostructured crystalline and corrosion resistant alumina film on bell metal at low temperature by rf magnetron sputtering |
| |
Authors: | H Kakati |
| |
Institution: | Plasma Physics Laboratory, Material Sciences Division, Institute of Advanced Study in Science and Technology, Paschim Boragaon, Guwahati 781035, Assam, India |
| |
Abstract: | Aluminium oxide films deposited by rf magnetron sputtering for protective coatings have been investigated. The alumina films are found to exhibit grainy surface microstructure. The grain size, structure and density depend on different system parameters such as argon and/or oxygen flow rate and applied rf power etc. The effect of transition of the discharge from metallic to reactive mode on the surface characteristics of the alumina film is studied. X-ray diffractometry reveals that in poisoned mode of sputtering and under optimized power and pressure, crystalline alumina film can be grown. Different system conditions are optimized for corrosion resistant aluminium oxide films with good adhesion properties. Nanostructured alumina film is obtained at lower pressure (8 × 10−4 to 9 × 10−4 Torr) by rf reactive magnetron sputtering. |
| |
Keywords: | Crystalline alumina Rf magnetron sputtering Corrosion Adhesion |
本文献已被 ScienceDirect 等数据库收录! |
|