| 红外保护膜性能评估和分析 |
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| 引用本文： | 韩军,柴常春,杨银堂,李跃进. 红外保护膜性能评估和分析[J]. 应用光学, 2003, 24(1): 22-24 |
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| 作者姓名： | 韩军 柴常春 杨银堂 李跃进 |
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| 作者单位： | 西安电子科技大学,微电子所,陕西,西安,710071 |
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| 基金项目： | 国防科技预研基金资助项目 |
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| 摘 要： | 讨论红外保护膜的作用，分析和介绍保护膜的机械强度以及保护膜的外应力和内应力产生的破坏和影响，并提出了应对措施，探讨保护膜在恶劣环境下的光学性能，指出优化控制膜厚的重要性。
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| 关 键 词： | 红外保护膜 性能评估 机械强度 应力 光学性能 红外器件 |
| 文章编号： | 1002-2082(2003)01-0022-03 |
| 收稿时间： | 2002-04-01 |
THE PERFORMANCE EVALUATION AND ANALYSIS OF THE PROTECT FILMS FOR INFRARED INSTRUMENTS |
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| Abstract: | The effect of the protect films on infrared instruments is discussed. The better mechanical performance of the protect films also has been introduced. Some damage, such as crack and delamination caused by the intrinsic and extrinsic stress in the protect films is analyzed and some measures to deal with it is presented. The optical performance of the protect films,especially in hard environment, is studied and analyzed. It is important for protect films' optical performance to select the optimized thickness of protect fillms. |
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| Keywords: | protect films mechanical performance stress optical performance |
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