一种新型无源MEMS万向碰撞开关

采用MEMS体Si加工工艺和圆片级封装技术,开发了一种基于特种运输中的新型无源MEMS万向碰撞开关。开关选用弹簧-质量-阻尼的典型碰撞结构,对惯性加速度计敏感,以碰撞接触的形式提供导通电阻信号,并拥有500g径向360°和1000g纵向碰撞触发,单个器件可以实现多个器件的功能。经过仿真设计和工艺研究,最终完成了开关的制作,封装后体积后为6.6mm×5mm×2.4mm。经测试表明开关实现了初始的设计阈值,导通电阻约10Ω,导通时间约10μs,验证了抗5000g冲击能力,它具有体积小、重量轻、高可靠、低成本,可反复使用等特点,在可靠性跌落试验、汽车安全碰撞试验和飞行器上具有广泛的应用前景。

Novel Passive MEMS Universal Crash Switch

A novel passive MEMS universal crash switch for the special-type transport was developed.The switch was fabricated using the bulk micromachining process and packaged in wafer level.The structure is the classical spring-quality-damp.The switch,which has multiple functions and can be repeatedly used,puts out the signal with 500 g 360° in radial direction and 1 000 g in longitudinal direction.By simulating and researching the process,the switch was finally developed.The bulk is 6.6 mm×5 mm×2.4 mm in size after packaged.The test results show that designed threshold value is achieved,on-state resistance is about 10 Ω,and onstate time is 10 μs.It is also approved that the switch can endure 5 000 g impact.The switch has the advantages of small size,light weight,good reliability,low price and repeat using.It can be wildly used in the vehicle crash test,drop test on reliability and aircrafts.