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| 溶胶—凝胶法制备BST铁电薄膜及性能研究 | |
| 引用本文： | 赵敏,张荣君,顾豪爽 陈铭南.溶胶—凝胶法制备BST铁电薄膜及性能研究[J].红外与毫米波学报,2001,20(1):73-76. |
| 作者姓名： | 赵敏 张荣君 顾豪爽 陈铭南 |
| 作者单位： | 1. 同济大学应用物理系, 2. 复旦大学光科学与工程系, 3. 湖北大 学压电陶瓷研究所, |
| 摘 要： | 研究了一种以水为溶剂的(Ba |
| 关 键 词： | BST薄膜 溶胶－凝胶法 介电性能 漏电流 结构 铁电薄膜 |
| 修稿时间： | 2000年9月4日 |
PREPARATION OF (Ba0.5Sr0.5)TiO3 THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS |
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| ZHAO Min.PREPARATION OF (Ba0.5Sr0.5)TiO3 THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS[J].Journal of Infrared and Millimeter Waves,2001,20(1):73-76. | |
| Authors: | ZHAO Min |
| Abstract: | (Ba0.5Sr0.5)TiO3 ferroelectric t hin films were prepared by Sol-Gel processing. Films with thickness of 160nm t reated at 700℃ for 1h showed pure perovskite structure and good dielectric, ins ulating properties, i.e. a dielectric constant of 225, a dielectric loss of 0.04 4, a leakage current density of 8.0×10－8A/cm2. The leakage current density was found to depend on the annealing temperature. The measurement of the J-V characteristics on films indicated the conduction process to be bulk- limited. |
| Keywords: | Ba 0 5 Sr 0 5 TiO 3 SOL GEL dielectric property leakage current |
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