Thin‐film characterization with x‐ray microanalysis. Extending and improving invariant embedding results

Invariant embedding theoretical results for the recorded x‐ray intensities in electron probe microanalysis were used to develop a procedure for thin films. The method presented here gives the possibility of achieving thin‐film characterization directly from characteristic x‐rays intensities measurements, without the necessity to make an explicit calculation of the ?(ρz) function. Theoretical results are found to follow the general trend of experimental data. Copyright © 2003 John Wiley & Sons, Ltd.