Integrated TiO2 resonators for visible photonics |
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| Authors: | Choy Jennifer T Bradley Jonathan D B Deotare Parag B Burgess Ian B Evans Christopher C Mazur Eric Lončar Marko |
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| Institution: | School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138, USA. jchoy@fas.harvard.edu |
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| Abstract: | We demonstrate waveguide-coupled titanium dioxide (TiO(2) racetrack resonators with loaded quality factors of 2.2×10(4) for the visible wavelengths. The structures were fabricated in sputtered TiO(2) thin films on oxidized silicon substrates using standard top-down nanofabrication techniques, and passively probed in transmission measurements using a tunable red laser. |
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