Polarization phase-shifting Newton interferometer for plane optical surface measurements |
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| Authors: | Lin Shyh-Tsong Chen Liang-Chia Yeh Sheng-Lih Trinh Hu'ng-Xuân Chen Hung-Pin |
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| Affiliation: | Department of Electro-optical Engineering, National Taipei University of Technology, Taipei, Taiwan. f10402@ntut.edu.tw |
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| Abstract: | This Letter introduces a polarization phase-shifting Newton interferometer that can be utilized for plane optical surface measurements, a setup constructed to realize the interferometer, and the experimental results from the use of the setup. The results confirm not only the validity but also the feasibility of the interferometer. |
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