Sputtering of boron nitride single crystals of different structure

Results obtained in studying the sputtering of single crystals of hexagonal, rhombohedral, and cubic boron nitride modifications by computer simulations are reported. Data on sputtering the (0001) face of BN in two graphite-like modifications and the (111) face of BN crystals with a cubic lattice are presented. The energy and angular dependences of the sputtering yields and spatial and energy distributions of sputtered particles are considered for the cases of normal and oblique ion incidence. Specific features of the anisotropy of spatial distributions of sputtered particles and mechanisms of their formations are analyzed.