| 微透镜用于高Tc超导薄膜红外探测器的设计与讨论 |
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| 引用本文： | 张新宇. 微透镜用于高Tc超导薄膜红外探测器的设计与讨论[J]. 光学技术, 2000, 26(1): 13-15 |
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| 作者姓名： | 张新宇 |
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| 作者单位： | 华中理工大学光电子工程系!武汉430074(张新宇，易新建，何苗，赵兴荣)，陕西青华机电研究所!陕西长安710111(李保平) |
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| 摘 要： | 通过分析现有的基于在高温超导体超导转变温区的热效应及光子效应的薄膜型器件的结构特点和光电特性，讨论了利用单片折射型微透镜进行高温超导薄膜红外探测器光电响应性能改善的可行性，给出了几种典型的可与高温超导薄膜红外探测器耦合的单片面阵硅折射型微透镜阵列的SEM测试结果及主要的几项参数指标。
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| 关 键 词： | 超导红外探测器 折射微透镜 |
| 修稿时间： | 1998－09－01 |
Design and discussion of high Tc Superconducting thin film IR detectors with refractive microlens |
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| ZHANG Xin yu ,LI Bao ping ,YI Xin jian ,HE Miao ,ZHAO Xing rong. Design and discussion of high Tc Superconducting thin film IR detectors with refractive microlens[J]. Optical Technique, 2000, 26(1): 13-15 |
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| Authors: | ZHANG Xin yu LI Bao ping YI Xin jian HE Miao ZHAO Xing rong |
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| Affiliation: | ZHANG Xin yu 1,LI Bao ping 2,YI Xin jian 1,HE Miao 1,ZHAO Xing rong 1 |
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| Abstract: | The structure and opto electronic characteristics of high Tc superconducting thin film detectors are analyzed. The improvement of opto electronic characteristics of high Tc superconductors with refractive microlens is discussed. Several typical refractive microlens obtained by using ion beam etching method, which is coupled with the high Tc superconducting thin film detectors, are given. |
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| Keywords: | superconducting IR detector refractive microlens |
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