非球面干涉定心方法研究

由于非球面光轴的唯一性,非球面定心工艺中需分别定义顶点偏心误差和球心偏心误差.通过估算顶点偏心在传统定心仪上的测量误差,可以发现传统定心仪很难达到控制目的,而干涉测量方法却能得到较高的准确度.理论推导和模拟计算表明：顶点偏心角与偏心彗差之间有线性关系,顶点偏心角的彗差灵敏度与非球面的陡度成正比.使用干涉检测的方法可以同时控制非球面的两种偏心误差,且其检测准确度可以达到0.02 mm.

Study on Optical Centering of Aspheric Mirror by Interferometry

The vertex off-centering error and curvature center off-centering error are defined according to the unique optical axis of aspheric mirror. Error budget estimation about conventional centering method shows that it cannot be used to control the vertex off-centering error,so interferometric method was suggested.After some theory and simulation are discussed,it shows that there is linearity relationship between the vertex off-centering error and the off-centering coma, and that the sensitivity of the linearity is in proportion to the aspheric gradient of the surface,so the interferometric method can control the two off-centering error of aspheric optic with an accuracy about 0.02 mm.