| FeCl+轰击Ag靶的溅射产额非线性增强效应 |
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| 引用本文： | 王震遐,王玟珉,朱福英,吉桂芳,罗文芸,李欣年,王传珊.FeCl+轰击Ag靶的溅射产额非线性增强效应[J].中国物理 C,1997,21(4):304-310. |
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| 作者姓名： | 王震遐 王玟珉 朱福英 吉桂芳 罗文芸 李欣年 王传珊 |
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| 作者单位： | [1]中国科学院上海原子核研究所 [2]上海大学物理系 |
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| 摘 要： | 报道了用FeCl+、56Fe+和35Cl+轰击Ag靶的溅射原子角分布和产额测量结果.发现FeCl+轰击Ag的原子溅射产额与56Fe+和35Cl+轰击的溅射产额之和相比有大的增强.这种溅射产额增强现象可以用热峰蒸发(thermal spike-evaporation)加上表面拓扑效应(surface topography effect)的理论模型进行解释.
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| 关 键 词： | 离子溅射 溅射原子角分布 溅射产额 非线性增强 热峰效应 表面拓朴效应 |
The Nonlinear Enhancement Effect of Sputtered Ag atoms With FeCl Bombardment |
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| Wang Zhenxia,Wang Minmin,Zhu Fuying.The Nonlinear Enhancement Effect of Sputtered Ag atoms With FeCl Bombardment[J].High Energy Physics and Nuclear Physics,1997,21(4):304-310. |
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| Authors: | Wang Zhenxia Wang Minmin Zhu Fuying |
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| Abstract: | Measurements of the angular distributions and yields of atoms sputtered from Ag target by bombardment with FeCl , 56 Fe and 35 Cl are reported. Large enhancement occurs in the measured Ag atom yield for FeCl projectile in comparison with the sum of the sputtering yields for 56 Fe and 35 Cl bombardment at same impact velocities .The enhanecment can be explained by a model of the thermal spike evaporation plus surface topography effect. |
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| Keywords: | ion sputtering angular distribution of sputtering atoms sputtering yield non linear enhancement thermal spike effect surface topography effect |
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