Fabrication of micrometer-size glass solid immersion lens |
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| Authors: | T Yano S Shibata T Kishi |
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| Institution: | (1) Department of Chemistry and Materials Science, Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8552, Japan |
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| Abstract: | A micrometer-size solid immersion lens (μ-SIL) of glass with a super-spherical shape is obtained using a simple preparation procedure. Soda-lime–silica glass particles are melted on a glassy-carbon substrate with a surface of optical grade and cooled to room temperature. The obtained glass particles are transparent and have a super-spherical shape. Their shapes are found to satisfy the conditions of the SIL function for evanescent-field optics. Fine uneven surface textures of an integrated circuit with the depth of about 20 nm are clearly recognized using the prepared μ-SIL, and 1.8 times higher horizontal resolution than without the μ-SILis also attained. It was ensured that the glass μ-SILworks as the evanescent-field optics to visualize the nanometer-scale structure. PACS 42.70.Ce; 42.79.Bh; 68.03.Cd; 68.08.Bc; 68.37.Uv |
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