Abstract: | The local structure around the indium atoms in uncapped and capped InxGa1?xN quantum dots has been studied by In K‐edge extended X‐ray absorption fine structure (EXAFS) spectroscopy. The samples were grown by metal organic vapour phase epitaxy. The EXAFS was successfully applied to study the structural properties of buried quantum dots which are not optically active. The analysis revealed that capping the quantum dots with GaN does not affect the bond distances of the In—N and In—Ga, but makes the In—In distance shorter by 0.04 Å. |