REFLECTIVE INFRARED ELLIPSOMETRY OF PLASTIC FILMS |
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Authors: | William R. Folks Sidhartha K. Pandey Greg Pribil Dennis Slafer Monis Manning Glenn Boreman |
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Affiliation: | (1) College of Optics and Photonics: CREOL & FPCE, University of Central Florida, Orlando, FL 32816-2700, USA;(2) J.A. Woollam Company, Inc., Lincoln, NE 68508, USA;(3) Microcontinuum Corporation, Cambridge, MA 02138, USA |
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Abstract: | High resolution reflective ellipsometry is used to study freely suspended plastic films. We determine room temperature optical constants in the infrared for a variety of plastics using ellipsometry. The films are typically 6 to 100 μm thick and measurements are performed from near infrared to long wave-IR. The setup includes modeling software to fit the ellipsometric data to a generalized oscillator model. The films studied include acrylics, fluoropolymers, and variations of polyethylene, polystyrene, and polyvinyl chloride (PVC) among others. We are able to determine in-plane and out-of-plane optical constants. Transmission spectra from FTIR measurements are plotted and compared with ellipsometry results. |
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Keywords: | Infrared ellipsometry FTIR Optical constants Plastics Polymer Frequency selective surface |
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