| High Spectral Resolution Mo/Si Multilayers Working at High Order Reflection |
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| 作者姓名： | 吴文娟 朱京涛 王占山 张众 王风丽 王洪昌 张淑敏 徐垚 程鑫彬 王蓓 李存霞 吴永荣 秦树基 陈玲燕 周洪军 霍同林 |
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| 作者单位： | [1]Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092 [2]National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029 |
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| 基金项目： | Supported by the National Natural Science Foundation of China under Grant Nos 60378021 and 10435050, the Hi-Tech Research and Development Programme of China, the Program for New Century Excellent Talents in University （NCET-04-0376）, and the Research Fund of Tongji University. |
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| 摘 要： | The high reflectance orders are used to improve the spectral resolution of Mo/Si multilayers. The multilayers for the first-, second- and third-order reflectance are designed and optimized, respectively. These multilayers are fabricated by using a directed current magnetron sputtering system, and the reflectivity is measured in an extreme ultraviolet range by synchrotron radiation. The experimental results show that the spectral resolution λ/Δλ（λ= 14 nm） increases from 24.6 for the first order to 66.6 for the third order.
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| 关 键 词： | 高光谱分辨率 高阶反射 最优化 磁电管 紫外范围 |
| 收稿时间： | 2006-04-03 |
| 修稿时间： | 2006-04-03 |
High Spectral Resolution Mo/Si Multilayers Working at High Order Reflection |
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| WU Wen-Juan, ZHU Jing-Tao, WANG Zhan-Shan, ZHANG Zhong, WANG Feng-Li, WANG Hong-Chang, ZHANG Shu-Min, XU Yao, CHENG Xin-Bin, WANG Bei, LI Cun-Xia, WV Yong-Rong, QIN Shu-Ji, CHEN Ling-Yan, ZHOU Hong-Jun, nvo Wong-Lin.High Spectral Resolution Mo/Si Multilayers Working at High Order Reflection[J].Chinese Physics Letters,2006,23(9):2534-2537. |
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| Authors: | WU Wen-Juan ZHU Jing-Tao WANG Zhan-Shan ZHANG Zhong WANG Feng-Li WANG Hong-Chang ZHANG Shu-Min XU Yao CHENG Xin-Bin WANG Bei LI Cun-Xia WV Yong-Rong QIN Shu-Ji CHEN Ling-Yan ZHOU Hong-Jun nvo Wong-Lin |
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| Institution: | 1.Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092 ; 2.National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029 |
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