等离子体光学加工关键技术研究现状

等离子体加工技术是近年来发展起来的先进光学制造技术，具有快速缓解或去除传统光学加工方法导致的表面/亚表面损伤，以及高效、高精度和高分辨率修整光学面形的优势。从等离子体光学加工基本原理出发，基于等离子体激发频率与特征对发生器进行了简要叙述；进一步对各研究机构在等离子体加工技术涉及的射流特性、界面物化反应、损伤去除机理、去除函数、加工热效应和工艺定位等关键技术研究内容及成果进行分析，并对等离子体的新型光学加工技术进行介绍。随着研究的不断深入，构建多物理场和化学反应综合作用下的等离子体加工模型，揭示表面等离子体特性分布与去除函数的内在联系，从而建立准确的去除函数模型，是提高修形精度的发展方向，研究热效应控制方法和补偿策略在降低由热效应带来的修形误差方面起到了重要作用。

Research status of key technologies in plasma optics fabrication

The plasma processing technology is an advanced optics fabrication technology developed in recent years, which has the advantages of quickly mitigating or removing surface/subsurface damage caused by traditional optics fabrication methods, and trimming optical surfaces with high efficiency, high precision and high resolution. Starting from the basic principle of plasma optical processing, the generator was briefly introduced based on the excitation frequency and characteristics of the plasma. The research contents and achievements of key technologies such as jet characteristics, interface physicochemical reaction, damage removal mechanism, removal function, processing thermal effect and process positioning involved in plasma processing technology by various research institutions were analyzed, and the new optical processing technology of plasma was introduced. With the continuous deepening of research, a plasma processing model under the combined action of multi-physics field and chemical reactions was constructed to reveal the intrinsic relationship between the distribution of surface plasma characteristics and the removal function, so as to establish an accurate removal function model, which is the development direction of improving the modification accuracy. The research on thermal effect control methods and compensation strategies plays an important role in reducing the modification error caused by thermal effects.