数字微镜器件反射效率测试方法及装置北大核心CSCD

为了获得数字微镜器件的真实光学特性,提出了其反射特性测试方法,并搭建实验装置对数字微镜器件的相对反射效率进行了测试,搭建了测试光路;利用该光路分别测得数字微镜器件和铝反射镜作为反射元件时相机接收到的光斑能量分布曲线,并对曲线进行积分;将2种测试条件下获得的积分值做除法,得到数字微镜器件的相对反射效率。测试结果表明,在使用632.8 nm波长激光器作为光源时数字微镜器件的相对反射效率为45.33%,在使用白光LED作为光源时数字微镜器件的相对反射效率为71.75%,经过多次测试发现2种测试模式下的重复精度均为±5%左右。上述测试结果可对今后使用数字微镜器件开发相关仪器时的能量传递效率计算以及器件选择起到一定参考作用。

Test method and device for reflection efficiency of digital micro-mirror device

In order to obtain the real optical characteristics of digital micro-mirror devices (DMD), a test method for the reflection characteristics was proposed, and an experimental device was built to test the relative reflection efficiency of digital micro-mirror devices. Firstly, the test optical path was built. Then, the optical path was used to measure the spot energy distribution curves received by the camera when the digital micro-mirror device and the aluminum mirror were used as the reflecting elements respectively, and the curves were integrated. Finally, the relative reflection efficiency of the digital micro-mirror device was obtained by dividing the integral values obtained under the two test conditions. The test results show that the relative reflection efficiency of the digital micro-mirror device is 45.33% when using a 632.8 nm wavelength laser as the light source and 71.75% when using the white LED as the light source. After many tests, it is found that the repeatability precision of the two test modes is about ± 5%. The above test results can be used as a reference for the calculation of energy transfer efficiency and device selection when using digital micro-mirror devices to develop related instruments in the future.