| 薄膜微区厚度测定计算程序——Monte Carlo模拟 |
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| 引用本文： | 何延才,黄月鸿,胡敏. 薄膜微区厚度测定计算程序——Monte Carlo模拟[J]. 计算物理, 1987, 4(3): 380-384 |
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| 作者姓名： | 何延才 黄月鸿 胡敏 |
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| 作者单位： | 中国科学院上海硅酸盐研究所 |
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| 基金项目： | 中国科学院科学基金资助的课题 |
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| 摘 要： | 根据作者发展的理论和计算方法[1-8],编制了有衬底薄膜厚度测定的计算程序。本程序使用方便,已广泛应用于各类功能薄膜材料的测定计算中。
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| 收稿时间： | 1986-11-16 |
A CALCULATION PROGRAM OF DETERMINING THICKNESSES OF THIN FILMS ON SUBSTRATES BY MONTE CARLO SIMULATION |
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| He Yan-cai,Huang Yue-hong,Ha Min. A CALCULATION PROGRAM OF DETERMINING THICKNESSES OF THIN FILMS ON SUBSTRATES BY MONTE CARLO SIMULATION[J]. Chinese Journal of Computational Physics, 1987, 4(3): 380-384 |
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| Authors: | He Yan-cai Huang Yue-hong Ha Min |
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| Affiliation: | Shanghai Institute of Ceramics, Academia Sinica |
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| Abstract: | On the basis of author's theories and calculation method[1,2,3],we made a evaluation program of determining thicknesses of thin films on substrates.The software can be conveniently operated,and have already been extensively applied to the calculations for determining thicknesses of avariety of film materials. |
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