Nanostructures of Si/SiO2/metal systems with tracks of fast heavy ions |
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| Authors: | S. E. Demyanov E. Yu. Kaniukov A. V. Petrov E. K. Belonogov |
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| Affiliation: | (1) Joint Institute of Solid-State and Semiconductor Physics, National Academy of Sciences of Belarus, Minsk, 220072, Belarus;(2) Voronezh State Technical University, Voronezh, 394026, Russia |
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| Abstract: | Structures based on the SiO2/n-Si and SiO2/p-Si systems, with nanopores in silicon dioxide layers filled with Cu and Ni nanoparticles, have been prepared and investigated using the fast heavy ion technology, which includes irradiation with 197Au26+ ions, chemical etching of ion tracks, and subpotential electrochemical deposition. The selectivity of filling nanopores with metals and cluster character of their formation in tracks is shown. |
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