Structural and compositional changes in ion-bombarded Ta2O5 |
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Authors: | D.K. Murti Roger Kelly Z.L. Liau J.M. Poate |
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Affiliation: | 1. California Institute of Technology, Pasadena, California 91125, USA;2. Bell Laboratories, Murray Hill, New Jersey 07974, USA |
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Abstract: | A detailed study of the effect of heavy-ion bombardment on Ta2O5 has been undertaken using a combination of radioactive tracer techniques, electron microscopy, and Rutherford backscattering. Crystalline Ta2O5 is amorphized at ~6 × 1013 ions cm?2, while at a dose of ~5 × 1016 ions cm?2 the electron microscopy reveals the development of random grains of a new crystalline phase. By ~1 × 1017 ions cm?2 the grains are not yet overlapping but still yield a diffraction pattern consistent with either δ-Ta-O (not to be confused with TaO) or Ta1?xO2, thus indicating that Ta2O5, like most other transition-metal oxides, is subject to preferential sputtering. Preferential sputtering was confirmed by backscattering analysis of specimens bombarded to high doses, where the average surface composition was found to be Ta1.8±0.2O2 or, equivalently, Ta2O2.2±0.2. The surface alteration had an average composition independent of the mass and energy of the incident ions. |
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