Heteroepitaxial growth of complex-oxide films from a self-organized system formed in a gas-discharge plasma

New experimental data on the characteristic features of the synthesis and crystallization of films of solid solutions of lead zirconate-titanate, deposited by means of rf diode sputtering of ceramic targets, are presented. Such a deposition system possesses threshold states, transition through which leads to a qualitative change in the processes occurring in the system and to the appearance of self-organization effects. The basic feature of this change is determined by the appearance of a new structured system, consisting of the sputtered particles and particles formed in the plasma, in the plasma of an rf discharge. Zh. Tekh. Fiz. 69, 87–91 (December 1999)