| Enhancement of H2 Sensing Properties of In2O3-based Gas Sensor by Chemical Modification with SiO2 |
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| 作者姓名： | ZiLiZHAN DengGaoJIANG JiaQiangXU |
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| 作者单位： | [1]SchoolofChemicalEngineering,ZhengzhouUniversity,Zhengzhou450002 [2]DepartmentofChemicalEngineering,ZhengzhouInstituteofLightIndustry,Zhengzhou450002 |
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| 摘 要： | The sensitivity and selectivity to H2 of a new In203-based gas sensor were improved significantly by surface chemical modification. A dense layer of SiO2 near the surface of the porous In2O3 bead was formed by chemical vapor deposition (CVD) of diethoxydimethysilane (DEMS). The dense layer functioned as a molecular sieve, thereby the diffusion of gases with large molecular diameters, except for 1-12, was effectively controlled, resulting in a prominent selectivity and high sensitivity for H2. The working mechanism of the sensor was also presented.
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| 关 键 词： | 氢气传感器 三氧化二铟 分子筛 表面修饰 二氧化硅 化学气相沉积 二乙氧基二甲硅烷 |
Enhancement of H2 Sensing Properties of In2O3-based Gas Sensor by Chemical Modification with SiO2 |
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| ZiLiZHAN DengGaoJIANG JiaQiangXU.Enhancement of H2 Sensing Properties of In2O3-based Gas Sensor by Chemical Modification with SiO2[J].Chinese Chemical Letters,2004,15(12):1509-1512. |
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| Authors: | Zi Li ZHAN Deng Gao JIANG Jia Qiang XU School of Chemical Engineering Zhengzhou University Zhengzhou |
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| Institution: | Zi Li ZHAN,Deng Gao JIANG,Jia Qiang XU,School of Chemical Engineering,Zhengzhou University,Zhengzhou 450002 Department of Chemical Engineering,Zhengzhou Institute of Light Industry,Zhengzhou 450002 |
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| Abstract: | The sensitivity and selectivity to H_2 of a new In_2O_3-based gas sensor were improved
significantly by surface chemical modification. A dense layer of SiO_2 near the surface of the porous
In_2O_3 bead was formed by chemical vapor deposition(CVD)of diethoxydimethysilane(DEMS).
The dense layer functioned as a molecular sieve, thereby the diffusion of gases with large molecular
diameters,except for H_2, was effectively controlled, resulting in a prominent selectivity and high
sensitivity for H_2. The working mechanism of the sensor was also presented. |
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| Keywords: | H_2 gas sensor indium oxide molecular sieve |
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