The effect of Al content,substrate temperature and nitrogen flow rate on optical band gap and optical features of nanostructured TiAlN thin films prepared by reactive magnetron sputtering期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

The effect of Al content,substrate temperature and nitrogen flow rate on optical band gap and optical features of nanostructured TiAlN thin films prepared by reactive magnetron sputtering

Authors:	Reza Jalali Mojtaba Parhizkar Hassan Bidadi Hamid Naghshara Seyd Reza Hosseini Majid Jafari

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