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Charge Loss Characteristics of Different Al Contents in a HfA10 Trapping Layer Investigated by Variable Temperature Kelvin Probe Force Microscopy |
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| Authors: | ZHANG Dong HUO Zong-Liang JIN Lei HAN Yu-Long CHU Yu-Qiong CHEN Guo-Xing LIU Ming YANG Bao-He |
| Institution: | [1]Tianjin Key Laboratory of Film Electronic and Communication Devices, Tianjin University of Technology, Tianjin 300384 [2]Institutes of Microelectronics, Chinese Academy of Sciences, Beijing 100029 |
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