| 具有初始构型的MEMS驱动器的跳跃和吸合现象研究 |
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| 引用本文： | 胡育佳, 朱媛媛, 程昌钧. 具有初始构型的MEMS驱动器的跳跃和吸合现象研究[J]. 固体力学学报, 2013, 34(2): 109-116. doi: 10.3969/j.issn.0254-7805.2013.02.001 |
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| 作者姓名： | 胡育佳 朱媛媛 程昌钧 |
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| 作者单位： | 上海理工大学机械工程学院,上海,200093; 上海师范大学计算机科学与技术系,上海,200234; 上海大学上海市应用数学和力学研究所,上海,200072 |
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| 基金项目： | 国家自然基金青年基金项目，上海市教委创新基金基金项目，上海市教育委员会重点学科建设项目 |
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| 摘 要： | 在曲梁变形后以弧长为参数的自然坐标系中,利用曲梁大变形分析理论,建立了具有任意初始构型的微电驱动器大变形电动力学分析的数学模型,并采用微分求积法(DQM)进行空间离散,得到了一组具有强非线性的微分-代数系统方程,运用Petzold-Gear BDF方法进行时间域内的求解.研究了MEMS驱动器在电场力作用下的瞬态动力学特性,包括跳跃(snap-through)和吸合(pull-in)现象,并与已有实验结果进行了比较.
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| 关 键 词： | 微电力学特性 大变形 曲梁 跳跃 吸合 |
| 收稿时间： | 2012-02-04 |
SNAP-THROUGH AND PULL-IN BEHAVIORS OF MEMS DEVICES WITH THE INITIAL CONFIGURATIONS |
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| Yujia Hu, Yuanyuan Zhu, Changjun Cheng. SNAP-THROUGH AND PULL-IN BEHAVIORS OF MEMS DEVICES WITH THE INITIAL CONFIGURATIONS[J]. Chinese Journal of Solid Mechanics, 2013, 34(2): 109-116. doi: 10.3969/j.issn.0254-7805.2013.02.001 |
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| Authors: | Yujia Hu Yuanyuan Zhu Changjun Cheng |
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| Abstract: | A microstructure-dependent large deformation electrodynamic model of MEMS devices with the initial configurations is established in an arc coordinate system based on the large deformation theory of the curved beam. The differential quadrature method (DQM) is applied to discretize the nonlinear mathematical model in the special domain. Afterwards, a set of the first order nonlinear differential & algebra system equations can be derived. The Petzold-Gear BDF method is used to solve the first order nonlinear differential & algebra system equations in the temporal domain. The transient micro-electromechanical behaviors, including snap-through and pull-in, of the MEMS switches under the electric force are studied in detail, and compares the obtained results with the existing experiment. |
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