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An error self-compensation mechanism for deposition of optical coatings with broadband optical monitoring |
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| Authors: | A V Tikhonravov I V Kochikov M K Trubetskov S A Sharapova V G Zhupanov A G Yagola |
| Institution: | 1.Research Computer Center,Moscow State University,Moscow,Russia;2.Max Planck Institute of Quantum Optics,Garching,Germany;3.Lutch Scientific Research Institution,Podolsk, Moscow,Russia;4.Department of Physics,Moscow State University,Moscow,Russia |
| Abstract: | An error self-compensation mechanism is investigated for use during the deposition of optical coatings with broadband optical monitoring. The correlation of thickness errors caused by monitoring procedure is mathematically described. It is shown that this correlation of errors may result in the effect of selfcompensation of errors. |
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