自适应压电式移相器的研究

移相器是移相干涉仪中的重要部件,压电式移相器由于分辨力高、响应快、控制容易而被大量采用。但压电陶瓷的非线性误差与位移量小,一直影响其应用范围的扩大。针对该问题,从压电式移相器机构与扩展方法入手,设计了具有放大特性的柔性铰链式移相器。采用单神经元(Proportional sum derivative,PSD)控制算法,实现微驱动定位的自适应实时控制,改善了非线性,降低了环境干扰的影响,提高了压电式移相器的性能。所设计的压电式移相器用3组压电陶瓷堆驱动,可用于100 mm孔径镜片,位移行程达30μm以上。实验验证该方法有效,控制精度达0.01μm。

Study of Adaptive Piezoelectric Phase Shifter

Phase shifter is the important part of the phase shifting interferometer. For its high resolution, rapid response and easy operation, the piezoelectric phase shifter is widely used. Due to the non linear error and micro-displacement, its application is limited. The structure of piezoelectric shifter and its expansion methods are studied, and the flexible hinge phase shifter with magnifying characteristics is designed. Based on single neural proportional sum derivative (PSD) algorithm, adaptive real-time control is implemented which enhances the performance of the piezoelectric phase shifter by improving the nonlinear performance and depressing the interference of environment. Three piezoelectric ceramics are used in the piezoelectric phase shifter which can be used in the 100 mm aperture lens with 30 μm displacement. The result verifies this method with a precision of 0.01 μm.