射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究

分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N₂等离子体中电子能量分布、电子温度、电子密度等物理量随N₂含量的变化规律.实验研究结果表明：电子能量分布呈现出非Maxwell型分布，并由双温分布向三温分布过渡；电子温度在不同的气压下随N₂含量的增加呈现出不同的变化规律.在放电气压小于1.3 Pa时，电子温度随N₂含量的增加而下降；当气压大于1.3 Pa时，电子温度随N₂关键词： 感应耦合等离子体 2混合气体放电')" href="#">Ar-N₂混合气体放电 电子能量分布 Langmuir探针

Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N2 discharge

In this article we use the Langmuir probe and kinetic model to study the electron energy distribution function (EEDF), the electron temperature, and the electronic density in the radio-frequency inductively coupled plasma of Ar-N₂ discharge. It has been found that, with the increase of the N₂ flow, the EEDF varies from the bi-temperature distribution to the tri-temperature distribution; the electron temperature drops monotonically at low pressures (p<1.3 Pa), while it first increases and then drops at high pressures (p>1.3 Pa). In addition, due to the recombination of electrons and nitrogen molecular ions, the electron density drops substantially at high pressures when a small amount of N₂ is added to the gas mixture. Although the theoretically obtained electron temperature is high than the experimentally measured one, the theoretical model presents good predictions of the influences of N₂ ratio in Ar-N₂ mixture on the electron temperature and EEDF.