Controlled surface crystallization of fused silica by Li+-Ion implantation |
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Authors: | G. W. Arnold |
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Affiliation: | Sandia Laboratories , Albuquerque, New Mexico, 187185, USA |
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Abstract: | A new method of producing a glass-ceramic surface layer on fused silica has been demonstrated using Li+-ion implantation and relatively low-temperature annealing. Infrared reflection spectroscopy (IRS) was used to study the effects of ion implantation on structural changes. Isochronal annealing of samples implanted with 250 keV Li+/cm2 brings about a dramatic change in the IRS spectra at 800°C in that it becomes identical with that of α-quartz. The dependence of the degree of crystallization on temperature, Li+-ion fluence, and silica type was studied. |
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Keywords: | SAW epitaxial films mismatch dislocations |
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