kinetic energy reflection from polycrystals bombarded with Ar+, Kr+, and Xe+ ions

When the surface of a solid is bombarded with ions a fraction of the primary energy is reemitted by ion reflection and sputtering. The contribution of ion reflection or sputtering to energy reflection is determined by the mass ratio of the bombarding ions to the target atoms.^1,2 In the case of light ions the contribution of reflected ions is dominant. Results for He⁺ and Ne⁺ bombardment were described in a previous paper.³ The present paper deals with results for Ar⁺, Kr⁺, and Xe⁺ bombardment of the same targets as investigated before.³ The energies of the mass selected bombarding ions range from 9 to 16 keV. The measurements were carried out by means of the thermic detector described in a separate paper.⁴ For the given mass ratios most of the reemitted energy is related to sputtering.