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Sputtering of condensed noble gases by keV ions
Authors:R. Pedrys  R. A. Haring  A. Haring  F. W. Saris  A. E. De Vries
Affiliation:FOM Institute for Atomic and Molecular Physics , Kruislaan 407, 1098, Amsterdam, SJ
Abstract:Layers of Kr and Xe condensed at ~ 15 K and 35 K have been bombarded by 3-6 keV Ar+, Kr+ and Xe+ ions.

The sputtered neutrals were detected after a 1.43 m flight path by means of a mass spectrometer. Among the sputtered particles are considerable numbers of Van der Waals molecules, like Kr2, Kr3, Xe2 XeKr and XeKr2. The energy distribution of the sputtered particles give clues to the sputtering mechanisms involved.
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