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Determination of the Electron Density and Electron Temperature in A Magnetron Discharge Plasma Using Optical Spectroscopy and the Collisional-Radiative Model of Argon |
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| Authors: | K. E. Evdokimov M. E. Konishchev V. F. Pichugin A. A. Pustovalova N. M. Ivanova Ch. Sun’ |
| Affiliation: | 1.Institute of Physics and Technology of National Research Tomsk Polytechnic University,Tomsk,Russia |
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