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Non-uniform, axisymmetric misfit strain: in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
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关 键 词:薄膜  均衡压力  晶片  曲率测量  轴对称性
收稿时间:2005-05-12
修稿时间:2005-05-16

Non-uniform,axisymmetric misfit strain: in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures
Yonggang?HuangEmail author,D.?Ngo,A. J.?Rosakis. Non-uniform,axisymmetric misfit strain: in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures[J]. Acta Mechanica Sinica, 2005, 21(4): 362-370. DOI: 10.1007/s10409-005-0051-9
Authors:Yonggang?Huang  author-information"  >  author-information__contact u-icon-before"  >  mailto:huang@uiuc.edu"   title="  huang@uiuc.edu"   itemprop="  email"   data-track="  click"   data-track-action="  Email author"   data-track-label="  "  >Email author,D.?Ngo,A. J.?Rosakis
Affiliation:(1) Department of Mechanical and Industrial Engineering, University of Illinois, Urbana, at Urbana-Champain, 1206West Green Street, IL, 61801, USA;(2) California Institute of Technology, Graduate Aeronautical Laboratory, Pasadena, CA 91125, USA
Abstract:Current methodologies used for the inference of thin film stress through curvature measurements are strictly restricted to stress and curvature states which are assumed to remain uniform over the entire film/substrate system. By considering a circular thin film/substrate system subject to non-uniform, but axisymmetric misfit strain distributions in the thin film, we derived relations between the film stresses and the misfit strain, and between the plate system’s curvatures and the misfit strain. These relations feature a ‘‘local’’ part which involves a direct dependence of the stress or curvature components on the misfit strain at the same point, and a ‘‘non-local’’ part which reflects the effect of misfit strain of other points on the location of scrutiny. Most notably, we also derived relations between the polar components of the film stress and those of system curvatures which allow for the experimental inference of such stresses from full-field curvature measurements in the presence of arbitrary radial non-uniformities. These relations also feature a ‘‘non-local’’ dependence on curvatures making a full-field measurement a necessity. Finally, it is shown that the interfacial shear tractions between the film and the substrate are proportional to the radial gradients of the first curvature invariant and can also be inferred experimentally.
Keywords:Non-uniform misfit strain  Non-uniform wafer curvatures  Stress-curvature relations  Non-local effects  Interfacial shears
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