Kinetic model of a DC oxygen glow discharge |
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Authors: | G. Gousset M. Touzeau M. Vialle C. M. Ferreira |
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Affiliation: | (1) Laboratoire de Physique des Gaz et des Plasmas, Université de Paris-Sud, Bât 212, 91405 Orsay Cedex, France;(2) Centro de Electrodinamica, INIC Instito Superior Tecnico, 1096 Lisboa Codex, Portugal |
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Abstract: | A simple kinetic model predicting the concentration of oxygen atoms, metastable singlet molecules O2(a1) and negative ions O — in the positive column of a DC glow discharge is developed. The calculated O and O2(a1) concentrations are compared to previously reported measurements for pressuresp=0.2–2 Torr and discharge currentsI=10–80 mA. The electron density calculated from the continuity equationj=nee vd agrees well with experiment. The rate coefficients for electron impact processes used in the balance equations of O, O2(a1), and O– were taken from the literature as a function of the reduced electric fieldE/N forE/N=40–80 Td. A reasonable agreement is obtained between the model and the experiment with a set of 10 reactions for the production and destruction of the above-mentioned species |
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Keywords: | Glow discharge singlet oxygen negative ion oxygen atom kinetic model |
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