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Kinetic model of a DC oxygen glow discharge
Authors:G Gousset  M Touzeau  M Vialle  C M Ferreira
Institution:(1) Laboratoire de Physique des Gaz et des Plasmas, Université de Paris-Sud, Bât 212, 91405 Orsay Cedex, France;(2) Centro de Electrodinamica, INIC Instito Superior Tecnico, 1096 Lisboa Codex, Portugal
Abstract:A simple kinetic model predicting the concentration of oxygen atoms, metastable singlet molecules O2(a 1Delta) and negative ions O — in the positive column of a DC glow discharge is developed. The calculated O and O2(a 1Delta) concentrations are compared to previously reported measurements for pressuresp=0.2–2 Torr and discharge currentsI=10–80 mA. The electron density calculated from the continuity equationj=n e e v d agrees well with experiment. The rate coefficients for electron impact processes used in the balance equations of O, O2(a 1Delta), and O were taken from the literature as a function of the reduced electric fieldE/N forE/N=40–80 Td. A reasonable agreement is obtained between the model and the experiment with a set of 10 reactions for the production and destruction of the above-mentioned species
Keywords:Glow discharge  singlet oxygen  negative ion  oxygen atom  kinetic model
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