Affiliation: | 1. AMMONO sp. z.o.o., Czerwonego Krzy?a 2/31, 00-377 Warsaw, Poland;2. Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland;3. Institute of Physics, Wroclaw University of Technology, Wybrze?e Wyspiańskiego 27, 50-370 Wroc?aw, Poland;4. Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11/17, 50-372 Wroc?aw, Poland |