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A laser-ablation system for deposition of high-temperature superconducting thin films for device applications |
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| Authors: | M Tuohiniemi T Kajava T Katila MM Salomaa R Salomaa and E Supponen |
| Institution: | (1) Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100080, People's Republic of China;(2) Physics and Technology College, Hebei University, Baoding, 071002, People's Republic of China; |
| Abstract: | We present a compact-size laser-ablation system to produce high-temperature superconducting (HTS) YBa2Cu3O7-' (YBCO) thin films for component applications. The system has been designed for deposition of multilayer structures on 5-cm-diameter substrates and for reliable operation with reduced need for maintenance. The performance of the system has been studied by depositing YBCO films on small LaAlO3 substrates. The films have critical temperatures of 88-90 K and critical current densities of 0.9-4.5 MA/cm2 as measured with an inductive technique. |
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