| 关于离子注入中温升的探讨 |
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| 引用本文： | 阚希文.关于离子注入中温升的探讨[J].微细加工技术,1992(1):14-21. |
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| 作者姓名： | 阚希文 |
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| 作者单位： | 北京师范大学低能核物理所 北京 |
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| 摘 要： | 本文在理论和试验两个方面探讨了离子注入中的热效应和温升现象。注入样品的温升对离子注入层的性能有直接影响。分析了理论计算注入样品温升的一些情况。给出了实际测量注入样品温升的几种试验方法。阐明了控制注入样品温升的若干可能途径。
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| 关 键 词： | 离子注入 热效应 温升 |
AN INVESTIGATION ON TEMPERATURE RISE IN ION IMPLANTATION |
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| Kan Xiwen.AN INVESTIGATION ON TEMPERATURE RISE IN ION IMPLANTATION[J].Microfabrication Technology,1992(1):14-21. |
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| Authors: | Kan Xiwen |
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| Abstract: | In this paper thermal effects and phenomenon of temperature rise in ion implantation are investigated from both theoretical and experimental sides. Temperature rise of implanted samples have direct influences on properties of ion implantation layer. Some cases df theoretical calculated temperature rise of implanted samples are analyzed. Experimental methods of practical measured temperature rise of implanted samples are given. Possible ways of controlling temperature rise of implanted samples are explained. |
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| Keywords: | Ion implantation Thermal effects Temperature rise |
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