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Quantitative studies of long-term stable, top-down fabricated silicon nanowire pH sensors
Authors:Sun Choi   Inkyu Park   Zhao Hao   Hoi-Ying N. Holman  Albert P. Pisano
Affiliation:(1) Berkeley Sensor and Actuator Center (BSAC), University of California at Berkeley, Berkeley, CA 94720, USA;(2) Ecology Department, Earth Sciences Division, Lawrence Berkeley National Laboratory, University of California at Berkeley, 406 Cory Hall, Berkeley, CA 94720, USA;(3) Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yoosung-Gu, Daejeon, Korea, 305-701
Abstract:We report a simple and effective method to develop long-term stable, top-down fabricated silicon nanowire (SiNW) pH sensors along with systematic studies on the performance of the sensors. In this work, we fabricated the SiNW pH sensors based on top-down fabrication processes. In order to improve the stability of the sensor performance, the sensors were coated with a passivation layer (PECVD-based silicon nitride) for effective electrical insulation and ion-blocking. The stability, pH sensitivity, and repeatability of the sensor response are critically analyzed with regard to the physics of sensing interface between sample liquid and the sensor surface. Also, trade-off between the stability and pH sensitivity of the sensor response is discussed.
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