| 波长1 31 5nm的石英窗口增透膜 |
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| 引用本文： | 宋永香,王英剑,王靖,张蕾,李庆国,李如凤. 波长1 31 5nm的石英窗口增透膜[J]. 强激光与粒子束, 2000, 12(Z1): 80-82 |
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| 作者姓名： | 宋永香 王英剑 王靖 张蕾 李庆国 李如凤 |
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| 作者单位： | 中国科学院上海光学精密机械研究所上海市800-211信箱 201800 |
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| 基金项目： | 国家863激光技术领域资助课题(863410-4-02) |
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| 摘 要： | 用Ta
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| 关 键 词： | 增透膜 优化膜系 |
| 文章编号： | 1001-4322(2000)0-0080-03 |
| 修稿时间： | 2000-08-25 |
The making of anti-reflection films based on quartz |
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| SONG Yong-Xiang,WANG Ying-jian,WANG Jing,ZHANG Lei,LI Qing-guo,LI Ru-feng. The making of anti-reflection films based on quartz[J]. High Power Laser and Particle Beams, 2000, 12(Z1): 80-82 |
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| Authors: | SONG Yong-Xiang WANG Ying-jian WANG Jing ZHANG Lei LI Qing-guo LI Ru-feng |
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| Abstract: | After optimizing the design of the thin films and improving the control methods of film thickness , we have coated the anti-reflection film based on the quartz by Ta 2O 5/SiO 2,and get the good result:R 1315 <0.05%. |
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| Keywords: | anti-reflection film optimization of the design of the thin fit |
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