光栅光阀的光学特性分析和仿真

光栅光阀是一种基于微型机电系统（MEMS）工艺的光调制器，利用其表面具有的可选择的变形部分（可动光阀），提供衍射光栅，被应用于投影显示等领域。光栅光阀的光学性能决定其在投影显示系统中应用的成败。依据多光束干涉理论和衍射理论对光栅光阀工作状态的光学特性进行了详细的理论分析和计算机仿真。结果说明，光栅光阀在工作中处于“开”态时，可动光阀下降的距离应该是入射波长的1／4倍；设计时选择h=λ0／2，δ=Aλ0／4；当间隙处的反射率不同时，占空比对光栅光阀的光学特性有着不同的影响，给出了占空比与反射率的最佳组合值。

Optical Characteristics Analysis and Simulation of Grating Light Valve

The grating light valve GLV,and optical modulator based on microelectromechanical systems MEMS,with the changable components mobile ribbons on its surface,can serve as a diffractive grating,and be used in projection and display fields.The optical performance of GLV is analyzed in details and simulated with interference and diffraction theory.All these indicate that when the GLV is in on state,the mobile ribbons should drop a quarter of the incident wavelength.When the reflectivity of the air gap is different,the effect of the duty ratio on the optical properties is different.The best matching value of duty ratio and reflectivity is presented.