Laser-assisted activation and metallization of polyimides |
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| Authors: | G A Shafeev |
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| Institution: | (1) General Physics Institute, Russian Academy of Sciences, Vavilov str. 38, Moscow, Russia |
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| Abstract: | Experimental results are presented on the maskless metallization of the surface of polyimides. In a certain range of laser parameters (Ar+ and copper-vapor lasers) the surface of polyimides irradiated in the air becomes catalytically active with respect to copper deposition from the solution for electroless copper plating. Copper lines 50–100  m wide are deposited on the Kapton films with good adherence. |
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| Keywords: | 61 40 81 10 81 40 82 20 |
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